• Title of article

    Fabrication of nanoscale Ti honeycombs by focused ion beam

  • Author/Authors

    Hosokawa، نويسنده , , H and Shimojima، نويسنده , , K and Chino، نويسنده , , Y and Yamada، نويسنده , , Y and Wen، نويسنده , , C.E and Mabuchi، نويسنده , , M، نويسنده ,

  • Pages
    3
  • From page
    365
  • To page
    367
  • Abstract
    Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
  • Keywords
    Focused ion beam , Ti honeycombs , Nanoscale Ti
  • Journal title
    Astroparticle Physics
  • Record number

    2062028

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2062028