Author/Authors :
J. Stoemenos، نويسنده , , J. and Dezauzier، نويسنده , , C. and Arnaud، نويسنده , , G. and Contreras، نويسنده , , S. and Camassel، نويسنده , , J. and Pascual، نويسنده , , J. and Robert، نويسنده , , J.L.، نويسنده ,
Abstract :
The structural, optical and electrical characteristics of commercially available cubic (β)-SiC films grown on 〈001〉 silicon waters were reported. For the structural characterization, combined plane view and cross-section transmission electron spectroscopy observations were made. For the optical investigations, low-temperature photoluminescence (2 K) and room temperature Raman and infrared spectra were measured. For the electrical characterization, Hall effect and resistivity measurements were performed in the temperature range 15–500 K.
Keywords :
silicon carbide , Transmission electron microscopy , Optical properties , electrical measurements
