Author/Authors :
A.G. Balanyuk، نويسنده , , V.V. and Dvoretsky، نويسنده , , S.A. and Fedorov، نويسنده , , A.A. and Liberman، نويسنده , , V.I. and Musher، نويسنده , , S.L. and Rubenchik، نويسنده , , A.M. and Ryabchenko، نويسنده , , V.E. and Stupak، نويسنده , , M.F. and Syskin، نويسنده , , V.S.، نويسنده ,
Abstract :
Generation of transmitted second harmonic radiation has been shown to be a fast and convenient technique for the determination of local crystal quality of semiconductor plates and films. This ‘transmission scheme’ makes it possible to get precise information about the surface layer of a sample. A computer controlled unit based on a YAP:Nd laser is described. Local orientation could be measured easily with a spatial resolution of up to 50 μm over 20 s. Scanning of a 40 × 40 mm surface map takes about 10 min.
Keywords :
second harmonic generation , YAP:Nd laser , Semiconductor film , Surface layer quality , Semiconductor plate
