Author/Authors :
Enisherlova، نويسنده , , K.L. and Kontsevoi، نويسنده , , Yu.A. and Chervyakova، نويسنده , , E.N. and Mitrofanov، نويسنده , , E.A. and Maishev، نويسنده , , Yu.P.، نويسنده ,
Abstract :
Experiments have been carried out on an industrial multifunctional ion-beam treatment system ‘Kashtan’ equipped as an ion source with a cold cathode ‘Radical-M’. DLC films have been produced from ion beams of CH4 and C6H12. The composition, structure, mechanical, optical and electrophysical properties of these films have been investigated. The technology of DLC films of 2.0 μm thickness deposited on GaAs wafers has been developed.
