Title of article
Investigations of diamond-like carbon films produced directly from an ion beam of industrial ion source with a cold cathode
Author/Authors
Enisherlova، نويسنده , , K.L. and Kontsevoi، نويسنده , , Yu.A. and Chervyakova، نويسنده , , E.N. and Mitrofanov، نويسنده , , E.A. and Maishev، نويسنده , , Yu.P.، نويسنده ,
Pages
4
From page
137
To page
140
Abstract
Experiments have been carried out on an industrial multifunctional ion-beam treatment system ‘Kashtan’ equipped as an ion source with a cold cathode ‘Radical-M’. DLC films have been produced from ion beams of CH4 and C6H12. The composition, structure, mechanical, optical and electrophysical properties of these films have been investigated. The technology of DLC films of 2.0 μm thickness deposited on GaAs wafers has been developed.
Keywords
Cold Cathode , Ion Beam , Diamond-like carbon films
Journal title
Astroparticle Physics
Record number
2065129
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