Growth of silicon carbide bulk crystals by the sublimation sandwich method
Author/Authors :
Mokhov، نويسنده , , E.N. and Ramm، نويسنده , , M.G. and Roenkov، نويسنده , , A.D. and Vodakov، نويسنده , , Yu.A.، نويسنده ,
Pages :
7
From page :
317
To page :
323
Abstract :
Sublimation sandwich method used earlier to obtain SiC epilayers is applied for growth of SiC bulk crystals. The possibility to obtain the SiC crystals of different polytypes is demonstrated. Mechanisms of generation of micropipes during bulk growth of SiC are discussed.
