Author/Authors :
Courtois، نويسنده , , B and Karam، نويسنده , , J.M and Lubaszewski، نويسنده , , M and Szekely، نويسنده , , V and Rencz، نويسنده , , M and Hofmann، نويسنده , , K and Glesner، نويسنده , , M، نويسنده ,
Abstract :
This paper deals with CAD, testing and manufacting of microsystems (microelectromechanical systems). Both existing tools and research areas are addressed. All through the paper, similarities between the present development of microsystems and the development of microelectronics decades ago are pointed out: the migration from point tools to CAD frameworks, testing, prototyping facilities, foundries/fabless business, intellectual property issues. Specific aspects such as thermal issues and testing are also addressed.
Keywords :
CAD , Manufacturing , testing , Microelectromechanical systems , microsystems
