Title of article
CAD tools and foundries to boost microsystems development
Author/Authors
Courtois، نويسنده , , B and Karam، نويسنده , , J.M and Lubaszewski، نويسنده , , M and Szekely، نويسنده , , V and Rencz، نويسنده , , M and Hofmann، نويسنده , , K and Glesner، نويسنده , , M، نويسنده ,
Pages
12
From page
242
To page
253
Abstract
This paper deals with CAD, testing and manufacting of microsystems (microelectromechanical systems). Both existing tools and research areas are addressed. All through the paper, similarities between the present development of microsystems and the development of microelectronics decades ago are pointed out: the migration from point tools to CAD frameworks, testing, prototyping facilities, foundries/fabless business, intellectual property issues. Specific aspects such as thermal issues and testing are also addressed.
Keywords
CAD , Manufacturing , testing , Microelectromechanical systems , microsystems
Journal title
Astroparticle Physics
Record number
2065363
Link To Document