Processing and ultraviolet patterning of LiNbO3 epitaxial films from metallorganic precursors

Ferroelectric thin films have been receiving great attention for applications in emerging areas. The sol-gel method has successfully been applied for processing the well controlled epitaxial ferroelectric films. LiNbO3 film processing is reviewed in this article. Epitaxial films of LiNbO3 could be synthesized by the reaction control of metal alkoxides on sapphire C substrates. The structures of precursor solutions were analyzed to control the crystallization. The chemically modified LiNbO3 precursor with a chelate ligand was designed to prepare the micro-patterned LiNbO3 epitaxial films using ultraviolet irradiation. The combination of micro patterning is a processing way to fabricate the more attractive channel to the sol-gel method.