C–H complex in Si observed at low temperatures

Local vibrational modes of a carbon–hydrogen complex have been identified with infrared absorption spectroscopy. After implantation of protons or deuterons at ≈20 K a carbon mode at 596 cm−1 and a hydrogen mode at 1884 cm−1 are observed in the sample annealed at 180 K. The two modes originate from the same defect, which is tentatively identified as bond centred hydrogen in the vicinity of a nearby substitutional carbon atom.