Conducting organic thin films by ion-assisted evaporation and their application to electronic devices and components

In order to obtain the high-quality thin films, we have proposed an ion-beam-assisted deposition of organic materials using a low energy ion source. The capacitor with organic conductive thin films as solid electrolyte and the electroluminescent (EL) diode with a single- or double-layer structure of organic thin films were prepared by ion-beam-assisted method. The solid electrolytic capacitor with a large capacitance per unit area and a good frequency response was obtained by using evaporated films. Also, the EL diodes have been constructed by means of evaporation under ion beam irradiation, the light emission intensity strongly increased compared with the thermal deposition method.