Title of article :
Advanced model for the simulation of BST-film growth with MOCVD
Author/Authors :
Vorob’ev، نويسنده , , A.N. and Archakov، نويسنده , , I.Yu. and Bord، نويسنده , , O.V. and Smirnov، نويسنده , , S.A. and Karpov، نويسنده , , S.Yu. and Makarov، نويسنده , , Yu.N. and Reinhold، نويسنده , , M. and Schumacher، نويسنده , , M. and Heuken، نويسنده , , M.، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 2003
Pages :
7
From page :
145
To page :
151
Abstract :
An advanced model of two- and three dimensional (2D and 3D) heat and mass transport coupled with surface chemistry and gas-phase clustering is developed for simulating the growth of barium strontium titanate BaSrTiO3 (BST) thin films by metal-organic chem
Keywords :
Gas-phase nucleation , growth , Thin film
Journal title :
Synthetic Metals
Serial Year :
2003
Journal title :
Synthetic Metals
Record number :
2078766
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=2078766
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