• Title of article

    Amorphisation processes in silicon

  • Author/Authors

    Müller، نويسنده , , Gerhard، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1998
  • Pages
    7
  • From page
    364
  • To page
    370
  • Abstract
    Amorphisation damage, a by-product of the ion-implantation process, has plagued silicon device technologists for more than three decades. More recently, physicists have become aware of the fact that ion bombardment of amorphised silicon represents an ideal model system for elucidating fundamental properties of both pure and hydrogenated silicon random networks.
  • Journal title
    Current Opinion in Solid State and Materials Science
  • Serial Year
    1998
  • Journal title
    Current Opinion in Solid State and Materials Science
  • Record number

    2088412