Sol-gel synthesis of Ba(Mg13Ta23O3: Phase pure powder and thin films

Phase pure Ba(Mg13Ta23O3 (BMT) powders were prepared using Ba metal, Mg(OC2H5)2, and Ta(OC2H5)5 as metal-organic precursors. Thin films of BMT were spin coated onto Pt-coated Si(100) substrates using the prepared solution and then fired at various temperatures. The X-ray diffraction patterns show that the films crystallize to a single disordered perovskite phase on Si (100) at ~600 °C. Scanning electron microscopy reveals that the films 0.3 μm in thickness and approximately 0.1 μm in grain size were essentially crack-free.