Title of article :
Study on microstructure and interdiffusion behavior in Pb(Fe12Nb12)O3/Pt/Ti/SiO2/Si(100) multilayer films
Author/Authors :
Wang، نويسنده , , Xinrong and Fan، نويسنده , , Shoushan and Li، نويسنده , , Qunqing and Gu، نويسنده , , Binglin and Zhang، نويسنده , , Xiaowen، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1997
Abstract :
Pb(Fe12Nb12)O3 (PFN) films on Pt/Ti/SiO2/Si(100) substrates were fabricated by pulsed laser deposition (PLD), and Pt/Ti/SiO2/Si(100) were formed by the deposition of Pt and Ti on SiO2/Si(100) using ion-beam sputtering technique. PFN/Pt/Ti/SiO2/Si(100) multilayer structure has been studied using Auger electron spectroscopy (AES), X-ray diffraction (XRD), and field emission scanning electron microscopy (FE-SEM). The diffusion of platinum into PFN film and Ti layer has been observed. The formation of a TiO2 phase was Confirmed.
Keywords :
A. Thin films , A. Multilayers , D. Diffusion , D. Microstructure , B. Laser deposition
Journal title :
Materials Research Bulletin
Journal title :
Materials Research Bulletin
