• Title of article

    Low-dielectric constant material—Synthesis and applications in microelectronics (MRS Symp. Proc. vol. 381): Edited by T.-M. Lu, S.P. Murarka, T.-S. Kuan and C.H. Ting. Materials Research Society, Pittsburgh, PA, 1995, 288 pages, hardback, $72 MRS member;

  • Author/Authors

    Sleight، نويسنده , , A.W.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 1997
  • Pages
    2
  • From page
    1603
  • To page
    1604
  • Journal title
    Materials Research Bulletin
  • Serial Year
    1997
  • Journal title
    Materials Research Bulletin
  • Record number

    2093778