Title of article :
Preparation of carbon films at ambient pressure and temperature, using laser triggered plasma pulses
Author/Authors :
Saini، نويسنده , , R.D and Dua، نويسنده , , A.K، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
6
From page :
1173
To page :
1178
Abstract :
A novel method is reported for the preparation of carbon films under ambient conditions of pressure and temperature. The substrate is surrounded by a gas mixture containing 10% carbon dioxide in nitrogen. A pulsed carbon dioxide laser is used to trigger the discharge of a capacitor, for producing a pulse of plasma in the gas mixture, and to superficially heat the substrate at the same time. The carbon film has been characterized by scanning electron microscopy (SEM), X-ray photoelectron spectrosopy (XPS), and Raman spectroscopy.
Keywords :
A. Thin films , B. plasma deposition , C. Electron microscopy , C. Photoelectron spectroscopy , B. Laser deposition
Journal title :
Materials Research Bulletin
Serial Year :
1999
Journal title :
Materials Research Bulletin
Record number :
2094443
Link To Document :
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