Author/Authors :
Hogan، نويسنده , , Zach L and Kreller، نويسنده , , Cortney R and Tran، نويسنده , , Kiet A and Hart، نويسنده , , Mark W and Wallraff، نويسنده , , Gregory M and Swanson، نويسنده , , Sally A and Volksen، نويسنده , , Willi and Lee، نويسنده , , Victor Y and Magbitang، نويسنده , , Teddie P and Hedrick، نويسنده , , James L and Hawker، نويسنده , , Craig R and Miller، نويسنده , , Robert D and Kim، نويسنده , , Ho-Cheo، نويسنده ,
Abstract :
Patterns of thin films of nanoporous poly(methylsilsesquioxane) (PMSSQ) were generated using a lithographic method coupled with reactive ion etching. Surface hydrophilicity of the nanoporous films was modulated using a simple UV/O3 treatment. A fluorescent dye, 6-carboxyfluorescein (6-FAM), was attached using a linker, bis(hydroxyethyl) aminopropyltriethoxysilane (HE-APTS), to the patterns. An approximately 10× increase in the green light intensity in the porous regions relative to flat silicon wafer surface was observed, which suggests that the patterned nanoporous PMSSQ thin film has a potential as a high density substrate for tethering bioprobe molecules.
Keywords :
Fluorescent dye , Nanoporous thin films , Poly(methylsilsesquioxane) , Lithographic patterning , High density biosubstrate
