A photochemical method for the preparation of indium oxide and indium–cobalt oxides thin films

Indium oxide and indium–cobalt oxide thin films have been successfully prepared by direct UV irradiation of amorphous films of β-diketonate complexes on Si(1 0 0) substrates. Deposited films were characterized by X-ray diffraction, Auger electron spectroscopy and X-ray photoelectron spectroscopy. The surface morphology of the films, examined by atomic force microscopy and scanning electron microscopy, revealed that mixed indium–cobalt oxide films are much smoother than In2O3 films, with rms surface roughness of 7.24 and 26.1 nm, respectively.