Fabrication of microlens in photosensitive hybrid sol–gel films using a gray scale mask

Hybrid sol–gel glasses, which combine the attractive features of organic polymers with those of inorganic glasses, are desirable materials for integrated optics. In this work, the synthesis and properties of an ultraviolet photosensitive hybrid sol–gel glass films are demonstrated. Multilevel diffractive lens in sol–gel film fabricated with a simple way of UV photolithography using a gray-scale mask is reported. The effects of UV light exposure and heat treatment on the properties of the film are also studied.