Complementarity of capacitance transient spectroscopy and drain current transient spectroscopy to detect traps in HEMTs

This work deals with the performances of two electrical techniques to characterize deep levels in HEMTs. Capacitance Deep Level Transient Spectroscopy (DLTS) is a well-known method and its efficiency is now proved, whereas Drain Current Transient Spectroscopy (DCTS) provides information about the location of traps in the structure. Experimental results establish the complementarity of these two techniques.