Kerf profile and piezoresponse study of the laser micro-machined PMN-PT single crystal using 355 nm Nd:YAG

A systematic study on laser micro-machining of PMN-PT single crystals has been performed. The PMN-PT single crystal has been micromachined using a 355 nm Nd:YAG laser. The kerf profile and cutting quality of the laser micro-machined PMN-PT single crystal were studied as functions of the laser process parameters. It was found that the direct proportional relationship between the depth of the kerf and the laser power provides an effective reference to determine the depth required to be ablated. It is significant for fabricating micro-devices using the single crystal by laser micro-machining. Besides the physical behavior, the piezoresponse of the PMN-PT single crystal has also been investigated by PFM. The results reveal that the laser micro-machining would not affect the macroscopic piezoelectric performance of the PMN-PT single crystal. The present work shows the feasibility of micro-patterning the PMN-PT single crystal into any geometry using a Nd:YAG laser.