Title of article
Characterization and humidity sensing of ZnO/42° YX LiTaO3 Love wave devices with ZnO nanorods
Author/Authors
Guo، نويسنده , , Y.J. and Zhang، نويسنده , , J. and Zhao، نويسنده , , C. and Ma، نويسنده , , J.Y. and Pang، نويسنده , , H.F. and Hu، نويسنده , , P.A. and Placido، نويسنده , , F. and Gibson، نويسنده , , D. and zu Putlitz، نويسنده , , X.T. and Zu، نويسنده , , H.Y. and Fu، نويسنده , , Y.Q.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2013
Pages
6
From page
5058
To page
5063
Abstract
Love mode surface acoustic wave devices based on ZnO/42° YX LiTaO3 were characterized with the thickness of the sputtered ZnO guiding layer varied from 250 nm to 1.18 μm. Phase velocity, temperature coefficient of resonant frequency, sensitivity, electromechanical coupling coefficient and humidity sensing of the Love mode SAW devices were studied as a function of the ZnO layer thickness. With increasing ZnO thickness over the range of thickness values we have examined, the sensitivity of 42° YX LiTaO3 to liquid loading increased and the values of electromechanical coupling coefficient decreased. The device with a thickness of 250 nm showed the best humidity response. ZnO nanorods were grown on this device and its humidity sensing performance has been further improved due to their large surface-to-volume ratio of the ZnO nanorods.
Keywords
A. Thin films , A. Nanostructures , C. X-ray diffraction , D. Surface properties , C. Electron microscopy
Journal title
Materials Research Bulletin
Serial Year
2013
Journal title
Materials Research Bulletin
Record number
2104538
Link To Document