Numerical study of gasdynamics influence on three-dimensional transport phenomena in vertical zinc selenide LPCVD reactor

The chemical vapour deposition of polycrystalline zinc selenide in a vertical rectangular reactor is numerically simulated on the basis of the three-dimensional transport equations for low Mach number flows. The results obtained suggest two different regimes of mass transfer. The influence of carrier gas flow rate on the process efficiency and the uniformity of deposited layers is analysed.