Unique crystallization process in sputter-deposited ti-ni shape memory films

During the crystallization of sputter-deposited amorphous Ti-rich Ti-Ni thin films at a relatively low temperature, aggregates comprising an extremely large number of nanocrystals (102–105) are formed and, to our surprise, it is found that these nanocrystals have the exactly the same orientation for an aggregate. The mechanism of the formation of such nanocrystals is explored.