Compositional analysis and depth profile studies on undoped and doped tin oxide films prepared by spray technique

Tin oxide (TO) and fluorine doped tin oxide (FTO) thin films of different thicknesses and varying impurity concentrations have been prepared by spray technique. The XRD results are in good agreement with ASTM data. From the XPS (X-ray photoelectron spectroscopy) studies, the presence of tin and oxygen in tin oxide has been confirmed and also the ratio of Sn/O has been found out. Chemical analysis of FTO films has been carried out by SAM (Scanning Auger Microprobe) studies and from the peak to peak height (PPH) calculations, Sn, O and F concentrations have been determined. The compositional analysis of FTO films at different depths (depth propfiles) has been studied. The results have been explained.