Design of a 600 V silicon carbide vertical power MOSFET

Silicon carbide (SiC) owns very interesting properties to fulfil the requirements of new power electronic applications. This paper reports the design of two vertical power MOSFETs, able to sustain a forward blocking voltage of 600 V. In order to evaluate the performance, 2D-simulations were performed taking into account the current technological constraints and the SiC materials parameters.