Influence of different growth and nucleation times on optical spectra of precipitated oxygen in silicon

A study of the optical response in the infrared (IR) spectral region of oxygen precipitates in silicon is performed at liquid helium temperature. The measurements concern a set of samples with the same density of precipitates of different dimensions and a second set of samples with different densities of precipitates of equal dimension. Two main shapes of precipitates are detected in both sets, with different behavior in terms of volume fractions occupied by each of them in the sample as a function of the thermal treatments performed.