Components for optoelectronic and photonic integrated circuits — design, modelling, manufacturing and monolithic integration on silicon

This paper presents our results in the field of silicon optoelectronic and photonic integrated circuits. We integrated photodetectors, linear or logic electronic circuits, waveguides, coupling elements, interferometers, transducing layers and micromechanical structures on the same silicon chip. Design, modelling and experimental manufacture of these components are presented, underlining the original approaches and results. Special structures for photodetectors were designed in order to allow monolithic integration with electronic circuits and waveguides. The attention was focused on the matching of all the involved technologies, to allow the monolithic integration of all components.