Optical properties of boron nitride thin films deposited by microwave PECVD

Hexagonal boron nitride thin films (h-BN) were deposited by microwave PECVD on various substrates (silicon, quartz, glass…), and were analysed by infrared, UV visible and microraman spectroscopies. The interpretation of the IR spectra recorded at oblique incidence allowed us to determine the preferential orientation of the c-axis of the h-BN films. The influence of the deposition conditions on the orientation is studied as a function of the plasma power. The optical constants in the infrared are also given by the Kramers–Krönig method.