Chemical composition and electrical conduction mechanism for CdO:F thin films deposited by spray pyrolysis

Interest in CdO is growing thanks to its potential use in different optoelectronic devices. Doping with fluorine has effectively improved its electro-optical properties. An analysis of the composition and electrical conduction mechanism of CdO:F films deposited by spray pyrolysis is made. Film properties result from the combined effect of oxygen substitution and oxygen vacancy occupation by fluorine atoms. Carrier scattering seems to be due to phonons and ionized or neutral impurities.