Growth of InAs quantum dots on focussed ion beam implanted GaAs(100)

The growth of self-assembled InAs quantum dots on implantation doped GaAs was studied. Be and Si ions were implanted in a combined ion implantation/molecular beam epitaxy process to generate p- and n-type GaAs, respectively. The quality of the InAs quantum dots was investigated by photoluminescence spectroscopy and scanning electron microscopy. By employing an in situ annealing step before re-growth it was possible to fabricate high quality InAs quantum dots on ion doped GaAs for Be doses up to 1.4×1014 cm−2. The sheet resistance of the Be doped GaAs was as low as 1 kΩ at 300 K and 0.6 kΩ at 4.2 K, respectively. Only for rather low Si doses up to 5×1013 cm−2 acceptable photoluminescence could be detected. The sheet resistance for these doses was 1 kΩ at 300 K and 1.7 kΩ at 4.2K.