Title of article
Microwave photoconductivity techniques for the characterization of semiconductors
Author/Authors
Citarella، نويسنده , , G. and von Aichberger، نويسنده , , S. and Kunst، نويسنده , , M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
5
From page
224
To page
228
Abstract
The use of microwave photoconductivity measurements as a tool for the non-destructive characterization of semiconductors is studied and the experimental equipment is described. Through some examples of experiments on silicon wafers covered with a silicon nitride coating the merits of different ways to perform these measurements are discussed.
Keywords
Lifeime measurements , Contactless photoconductance decay , Microwave photoconductivity measurements , Charge carrier kinetics
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2002
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2138116
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