Title of article :
Baseline variations near the nitrogen impurity vibrational bands in the infrared spectra of Czochralski silicon
Author/Authors :
Shirai، نويسنده , , Hiroshi and Kashima، نويسنده , , Kazuhiko، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2002
Abstract :
In the infrared absorbance spectra of nitrogen impurities in Czochralski silicon, a series of vibrational modes related to thermal donors causes baseline variations near the nitrogen-related vibrational bands in the range 950–1050 cm−1. Baseline varies depending on the difference in thermal donor formation between the test and reference samples.
Keywords :
Thermal donors , Czochralski silicon , Nitrogen
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Journal title :
MATERIALS SCIENCE & ENGINEERING: B