Title of article
Morphology, structure and optical properties of sol–gel ITO thin films
Author/Authors
Stoica، نويسنده , , T.F. and Teodorescu، نويسنده , , V.S and Blanchin، نويسنده , , M.G. and Stoica، نويسنده , , T.A. and Gartner، نويسنده , , M. and Losurdo، نويسنده , , M. and Zaharescu، نويسنده , , M.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
5
From page
222
To page
226
Abstract
The alkoxidic route and the spinning deposition were used to prepare monolayer sol–gel indium tin oxide (ITO) films. The morphology and crystalline structure were investigated by cross-section transmission electron microscopy (XTEM) and atomic force microscopy (AFM). The ITO sol–gel mono-layer contains three regions of different porosities. The basic crystalline structure is that of the In2O3 lattice. The optical properties have been studied by optical transmission and spectroscopic ellipsometry.
Keywords
morphology , structure , ITO films , Optical properties , Sol–gel
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Serial Year
2003
Journal title
MATERIALS SCIENCE & ENGINEERING: B
Record number
2139262
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