Properties of ITO films on glass fabricated by pulsed laser deposition

Transparent conducting indium tin oxide (ITO) on glass was fabricated by pulsed laser deposition using a Nd:YAG laser with a wavelength of 355 nm. ITO films were grown on glass substrate at various substrate temperatures (room temperature ∼500 °C) and at different oxygen pressures (0–100 mTorr). Under an oxygen pressure of 20 mTorr, the lowest resistivity of 9.5567×10−5 Ω cm was obtained for ITO films deposited at 500 °C. The optical and electrical properties of ITO films on glass are found to be dependent on the oxygen pressure and substrate temperature. The resistivity was decreased with an increase of substrate temperature owing to crystallinity, boundary scattering, and oxygen vacancies. The transmittance for the ITO films was about 80% at oxygen pressure over 20 mTorr. A four-point probe method, X-ray diffraction (XRD), atomic force microscopy (AFM), and UV–visible spectrometry are used to investigate the electrical, structural, and optical properties of ITO films.