The structure and soft magnetic properties of rapid recurrent thermal annealing CoNbZr nanocrystalline alloys thin films

Soft magnetic thin film and devices, especially nanometer crystal soft magnetic thin film, are touching in peopleʹs attention with good quality and widely application. We have developed a new method to use to nanocrystallize the amorphous CoNbZr thin film fabricated by DC magnetic sputtering under different conditions. The grain size of this film can be fined to 20–30 nm, the structure and properties of nanometer crystal thin film obviously be improved as controlling the temperature duration and recurrent times. The permeability increase from 3500 to over 5000, coercivity decrease from 4.6 to 1.5 Oe, resistivity from 1.4 to 0.5 Ωcm. The great improvement of soft magnetic film properties has obtained.