Low polarization and low temperature reflow of inorganic borophosphosilicate glasses formed from organic sources

It has been markedly epoch-making that we should form inorganic borophosphosilicate glasses for use in ULSIs from organic sources. Reversible glass forming reactions are proposed, and low electronic polarizable and low temperature reflow glasses are newly found. They showed good dielectric planarizing and low delay time capability as required for the step coverage of multilevel interconnections in ULSIs. A possible device planarization and C–V (capacitance and voltage) properties in MOS capacitors are briefly discussed.