Patterned intermetallic reaction of Ni3Al by laser interference structuring

Laser interference patterns were used to structure Ni–Al thin films on silicon. Hard and soft properties were combined in the patterned surface in the form of dot- or line-array through local intermetallic reactions. WLI and AFM showed the topography of the structured sample; X-ray diffraction (XRD) and nano-indentation showed the intermetallic phase and its microhardness.