Title of article
Fabrication of nanoscale Ti honeycombs by focused ion beam
Author/Authors
Hosokawa، نويسنده , , H and Shimojima، نويسنده , , K and Chino، نويسنده , , Y and Yamada، نويسنده , , Y and Wen، نويسنده , , C.E and Mabuchi، نويسنده , , M، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2003
Pages
3
From page
365
To page
367
Abstract
Ti honeycombs with the side of 800 and 400 nm were fabricated by focused ion beam (FIB), though the surfaces of the bottom and wall of the Ti honeycombs were rough, as compared with the surfaces of the bottom and wall of the Si honeycomb. It is demonstrated that the nanoscale Ti components can be fabricated in a short time by FIB.
Keywords
Ti honeycombs , Focused ion beam , Nanoscale Ti
Journal title
MATERIALS SCIENCE & ENGINEERING: A
Serial Year
2003
Journal title
MATERIALS SCIENCE & ENGINEERING: A
Record number
2141617
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