Organometallic chemical vapor deposition of compound semiconductors

Nano-sized zinc oxide (ZnO) was prepared by metal organic chemical vapor deposition (MOCVD) in a sulfonated polystyrene matrix. The effects of ultraviolet light irradiation on the growth of ZnO was examined. Scanning electron microscopy (SEM) analysis reveal that the ZnO nanoparticles have polycrystalline hexagonal wurtzite structure. The photodeposited films showed lower resistivities relatively to the non-irradiated films at 150 °C. Quantum chemistry was used to investigate the possible reactions of diethylzinc (DEZ) on PS-SO3H surface. The semiempirical simulations at PM3 level indicates strong interactions of DEZ with the polymeric surface and may be able to explain the growth of the highly crystalline ZnO on the polymeric substrate, as observed experimentally.