Dependency of the properties of SrxBiyTa2O9 thin films on the Sr and Bi stoichiometry

In this study the properties of ferroelectric SBT thin films crystallized at 700 °C have been investigated as function of the Sr and Bi stoichiometry. A matrix of 130 nm SrxBiyTa2O9 films with 0.7 ≤ x ≤ 1.0 and 2.0 ≤ y ≤ 2.4 has been realized by metal-organic spin-on deposition technique on Pt/IrO2/Ir/TiAlN/SiO2/Si substrates. Within this composition range, we found that the ferroelectric properties peak into a narrow window of 0.8 ≤ x ≤ 0.9 and y ∼ 2.25 with Pr and Ec of 6.5 μC/cm2 and 50 kV/cm, respectively (at 2.5 V). Outside this composition window, the Pr decreases while the hysteresis loop becomes slanted. For some Sr/Bi-ratios even no ferroelectricity was achieved. 2Ec-tendencies were seen as function of the x/y-ratios, too. Examination of the microstructure of the films by scanning electron microscopy showed that film grain size increased with decreasing Sr-deficiency and that nucleation increased with increasing Bi-excess. At high Sr-deficiency and low Bi-excess, no complete crystallization of the SBT film occurs. From the film morphology, also different phases can be discriminated. X-ray diffraction analysis showed a strong correlation of the film orientation with the film composition. While our results show a clear correlation of Pr, film grain size and orientation with composition, further investigations are required to clarify the relation of the hysteresis parameters with film orientation.