Title of article :
Light-beam-induced current measurements on copper–nickel co-contaminated Cz-silicon bicrystals
Author/Authors :
Saring، نويسنده , , Marcella P. and Rudolf، نويسنده , , C. and Stolze، نويسنده , , L. and Seibt، نويسنده , , M.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2009
Pages :
3
From page :
216
To page :
218
Abstract :
We report temperature-dependent LBIC-measurements on copper–nickel co-diffused Czochralski-silicon bicrystals focussing on the distribution and the recombination properties of the metal-precipitated defects. The samples had been hydrophobically wafer-bonded from two n-type materials with slightly different doping concentration and thermal history. LBIC analyses in cross-section geometry reveal substantially different spatial distributions of metal-related precipitates between the two crystals. This behaviour is explained by oxygen-related microdefects present in one wafer, acting as efficient nucleation sites. A precipitate-free zone was found below the surface but not beneath the bonding interface. At isolated colonies LBIC contrasts in the range of 50% have been observed indicating strong carrier recombination at such defects.
Keywords :
Metal impurities , Metal silicide precipitates , LBIC , Recombination activity , Extended defects , Silicon
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Serial Year :
2009
Journal title :
MATERIALS SCIENCE & ENGINEERING: B
Record number :
2146463
Link To Document :
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