Patterning of BaTiO3 by inkjet deposition using a precursor solution

BaTiO3 patterning was directly fabricated by a novel inkjet technique that deposited a precursor solution on a heated substrate. BaTiO3 precursor solution was prepared using ammoniumcitratoperoxotitanate and barium nitrate. X-ray diffraction and Raman scattering revealed that BaTiO3 with tetragonal and hexagonal phases was obtained from the precipitate heat treated at 650 °C for 4 h. Crystallized BaTiO3 dot patterns were fabricated by inkjet deposition at 360 °C followed by heat treatment at 650 °C for 4 h in an ambient atmosphere. The size and height of one dot was controlled by tuning the concentration of the solution and the number of droplets.