Hazardous industrial gases identified using a novel polymer/MWNT composite resistance sensor array

Hazardous industrial chemical gases pose a significant threat to the environment and human life. Therefore, there is an urgent need to develop a reliable sensor for identifying these hazardous gases. In this work, a silicon wafer microelectrode substrate for a resistance sensor was fabricated using the semiconductor manufacturing process. Conductive carbon nanotubes were then mixed with six different polymers with different chemical adsorption properties to produce a composite thin film for the fabrication of a chemical sensor array. This array was then utilized to identify three hazardous gases at different temperatures. Experimental results for six polymers for chemical gases, such as tetrahydrofuran (THF), chloroform (CHCl3) and methanol (MeOH) at different temperatures, indicate that the variation in sensitivity resistance increased when the sensing temperature increased. The poly(ethylene adipate)/MWNT sensing film had high sensitivity, excellent selectivity, and good reproducibility in detecting all chemical agent vapors. Additionally, this study utilized a bar chart and statistical methods in principal component analysis to identify gases with the polymer/MWNT sensor.