Title of article :
Patterning with block copolymer thin films
Author/Authors :
Segalman، نويسنده , , Rachel A.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
36
From page :
191
To page :
226
Abstract :
The nanometer-scale architectures in thin films of self-assembling block copolymers have inspired a variety of new applications. For example, the uniformly sized and shaped nanodomains formed in the films have been used for nanolithography, nanoparticle synthesis, and high-density information storage media. Imperative to all of these applications, however, is a high degree of control over orientation of the nanodomains relative to the surface of the film as well as control over order in the plane of the film. Induced fields including electric, shear, and surface fields have been demonstrated to influence orientation. Both heteroepitaxy and graphoepitaxy can induce positional order on the nanodomains in the plane of the film. This article will briefly review a variety of mechanisms for gaining control over block copolymer order as well as many of the applications of these materials. Particular attention is paid to the potential of perfecting long-range two-dimensional order over a broader range of length scales and the extension of these concepts to functional materials and more complex architectures.
Keywords :
block copolymers , Nanopatterning , Thin films , Polymer self-assembly , Block copolymer lithography , Microphase separation
Journal title :
Materials Science and Engineering R Reports
Serial Year :
2005
Journal title :
Materials Science and Engineering R Reports
Record number :
2152537
Link To Document :
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