• Title of article

    Near-field characteristics of periodic surface relief diffraction structures from far-field measurements

  • Author/Authors

    Aubrecht، نويسنده , , Ivo and Koudela، نويسنده , , Ivo and Miler، نويسنده , , Miroslav، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 1995
  • Pages
    5
  • From page
    63
  • To page
    67
  • Abstract
    Near-field characteristics of periodic surface structures, i.e. their surface relief, may be determined by measuring the diffraction efficiency, i.e. from far-field measurements, if the relief is described by a known periodic function with a few unknown geometric parameters. This method is formulated for one- and two-dimensional periodic structures and demonstrated for some holographic grating structures.
  • Journal title
    Ultramicroscopy
  • Serial Year
    1995
  • Journal title
    Ultramicroscopy
  • Record number

    2154501