Title of article :
A study of semiconductor surfaces and devices by coupled IR photon tunneling and atomic-force microscopy
Author/Authors :
Gall-Borrut، نويسنده , , P. and Castagne، نويسنده , , M. and Weyher، نويسنده , , J.L. and Fillard، نويسنده , , J.P. and Bonnafe، نويسنده , , J.، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 1998
Pages :
4
From page :
231
To page :
234
Abstract :
Processed InP and GaAs surfaces are studied by synchronous atomic-force (AFM) and photon scanning tunneling microscopy (PSTM). A beam injection system at 1.06 μm in the transparency range of semiconductors is described which makes it possible to perform total internal reflection (TIR) without any specific preparation or shaping on standard wafers.
Journal title :
Ultramicroscopy
Serial Year :
1998
Journal title :
Ultramicroscopy
Record number :
2154919
Link To Document :
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