Title of article
A spherical-aberration-corrected 200 kV transmission electron microscope
Author/Authors
Haider، نويسنده , , Max and Rose، نويسنده , , Harald and Uhlemann، نويسنده , , Stephan and Schwan، نويسنده , , Eugen and Kabius، نويسنده , , Bernd and Urban، نويسنده , , Knut، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 1998
Pages
8
From page
53
To page
60
Abstract
A hexapole corrector system was constructed for compensation of the spherical aberration of the objective lens of a transmission electron microscope. Implementing this system on a commercial 200 kV instrument with a field emission gun the spherical aberration correction was demonstrated and an improvement of the point resolution from 0.24 nm to better than 0.14 nm was realized. Applying the new instrument to structure studies on Si/CoSi2 interfaces it was demonstrated that an outstanding additional advantage of aberration correction is the substantially reduced contrast delocalization in high-resolution images.
Keywords
Transmission electron microscopy , Spherical-aberration correction , Spherical aberration , Structure images , Contrast delocalization
Journal title
Ultramicroscopy
Serial Year
1998
Journal title
Ultramicroscopy
Record number
2155088
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