Alignment of in situ AFM images using microstructured reference points

A method for the correction of both vertical and lateral drifts of in situ atomic force microscopy (AFM) images is presented. The surface of a copper plate is marked with microstructured carbonaceous reference points by electron-beam-induced deposition (EBD or EBID) in the chamber of a scanning electron microscope (SEM). Image alignment to these points using a numerical procedure facilitates the comparison of images recorded over periods of several hours where usually a shift due to thermal drift is observed. The applicability of the method is demonstrated in a corrosion experiment. Absolute changes in height can be determined with reference to the carbon markings which are not affected by the etching solution.