Advantages of elemental mapping by high-voltage EFTEM

Elemental mapping is one of the most important capabilities of energy-filtering transmission electron microscopy (EFTEM), which can be carried out in several types of TEM instruments. The recently developed post-column imaging filter makes it possible to perform the EFTEM in a high-voltage electron microscope without modifying the column of the microscope. The high-voltage EFTEM offers the possibility of performing high-resolution elemental mapping. Improvement in spatial resolution and collection efficiency specific to elemental mapping in the high-voltage EFTEM are due to the inelastically scattered electrons being concentrated into smaller scattering angles and due to relativistic effects.