Author/Authors :
S. and Britton Jr.، نويسنده , , C.L. and Jones، نويسنده , , R.L and Oden، نويسنده , , P.I and Hu، نويسنده , , Z and Warmack، نويسنده , , R.J. Murray-Smith a، نويسنده , , S.F and Bryan، نويسنده , , W.L and Rochelle، نويسنده , , J.M، نويسنده ,
Abstract :
A surface-micromachined micro-electro-mechanical-system (MEMS) process has been used to demonstrate multiple-input chemical sensing using selectively coated cantilever arrays. Cantilever motion due to absorption-induced stress was readout using a custom-designed, eight-channel integrated circuit. Combined hydrogen and mercury vapor detection was achieved with a palm-sized, self-powered module with spread-spectrum telemetry reporting.
